Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805982 | Epitaxial substrates and semiconductor devices | Tomohiko Shibata, Shigeaki Sumiya, Mitsuhiro Tanaka | 2004-10-19 |
| 6770914 | III nitride semiconductor substrate for ELO | Tomohiko Shibata, Shigeaki Sumiya, Mitsuhiro Tanaka | 2004-08-03 |
| 6765244 | III nitride film and a III nitride multilayer | Tomohiko Shibata, Shigeaki Sumiya, Mitsuhiro Tanaka | 2004-07-20 |
| 6727164 | Method for fabricating a semiconducting nitride film, susceptor tray, and apparatus for fabricating a semiconducting nitride film | Tomohiko Shibata, Yukinori Nakamura, Mitsuhiro Tanaka | 2004-04-27 |
| 6706620 | Method for fabricating a nitride film | Tomohiko Shibata, Mitsuhiro Tanaka, Osamu Oda | 2004-03-16 |
| 6703255 | Method for fabricating a III nitride film | Tomohiko Shibata, Shigeaki Sumiya, Mitsuhiro Tanaka | 2004-03-09 |
| 6703649 | Semiconductor element | Tomohiko Shibata, Osamu Oda, Mitsuhiro Tanaka | 2004-03-09 |