Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812165 | Manufacturing method of semiconductor integrated circuit device | Hidenori Sato, Yoshiyuki Hayashi | 2004-11-02 |
| 6809306 | Scanning unit and scanning microscope having the same | Akitoshi Toda | 2004-10-26 |
| 6706647 | Method of and apparatus for manufacturing semiconductors | Yoshitsugu Tsutsumi, Yoshio Okamoto, Hideki Tomioka, Akira Ohkawa | 2004-03-16 |