Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6730172 | Chucking device | Kenji Furuya, Shoji Tatejima, Yoshihiro Yamaguchi, Masayuki Terayama | 2004-05-04 |
| 6706647 | Method of and apparatus for manufacturing semiconductors | Yoshitsugu Tsutsumi, Yoshio Okamoto, Hideki Tomioka, Toshio Ando | 2004-03-16 |