Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834547 | Humidity sensor and fabrication method thereof | Chih-Kun Chen, Yao-Hsiung Kung, Chung-Min Lin | 2004-12-28 |
| 6761624 | Chemical mechanical polishing apparatus | Shan-Chang Wang | 2004-07-13 |
| 6713341 | Method of forming a bottle-shaped trench in a semiconductor substrate | Yi-Nan Chen, Hsien-Wen Liu | 2004-03-30 |