Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770569 | Low temperature plasma Si or SiGe for MEMS applications | Steven M. Smith, Raymond M. Roop | 2004-08-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770569 | Low temperature plasma Si or SiGe for MEMS applications | Steven M. Smith, Raymond M. Roop | 2004-08-03 |