Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770569 | Low temperature plasma Si or SiGe for MEMS applications | Juergen A. Foerstner, Steven M. Smith | 2004-08-03 |
| 6720635 | Electronic component | Daniel J. Koch, Bishnu Prasanna Gogoi | 2004-04-13 |