Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800428 | Wavelength-independent exposure pattern generation method and exposure pattern generation system for lithography | Tomoyuki Okada, Taketoshi Omata, Kazuya Sugawa, Kiyokazu Aiso, Tomoaki Kawaguchi | 2004-10-05 |
| 6723614 | Semiconductor device comprising layered positional detection marks and manufacturing method thereof | — | 2004-04-20 |