Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800428 | Wavelength-independent exposure pattern generation method and exposure pattern generation system for lithography | Tomoyuki Okada, Kazuya Sugawa, Kiyokazu Aiso, Masao Sugiyama, Tomoaki Kawaguchi | 2004-10-05 |