Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6817928 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott E. Moore | 2004-11-16 |
| 6769967 | Apparatus and method for refurbishing polishing pads used in chemical-mechanical planarization of semiconductor wafers | — | 2004-08-03 |
| 6749489 | Method and apparatus for planarizing and cleaning microelectronic substrates | David W. Carlson, Scott E. Moore | 2004-06-15 |