Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6817928 | Method and apparatus for planarizing and cleaning microelectronic substrates | Scott A. Southwick, Scott E. Moore | 2004-11-16 |
| 6749489 | Method and apparatus for planarizing and cleaning microelectronic substrates | Scott A. Southwick, Scott E. Moore | 2004-06-15 |