YH

Yaping Hua

ME Memsic: 1 patents #2 of 7Top 30%
Overall (2004): #85,509 of 270,089Top 35%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6712983 Method of etching a deep trench in a substrate and method of fabricating on-chip devices and micro-machined structures using the same Yang Zhao 2004-03-30