Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795752 | Thermal convection accelerometer with closed-loop heater control | Adrian P. Brokaw, Michael E. Rebeschini, Albert Leung, Gregory P. Pucci, Alexander Dribinsky | 2004-09-21 |
| 6712983 | Method of etching a deep trench in a substrate and method of fabricating on-chip devices and micro-machined structures using the same | Yaping Hua | 2004-03-30 |