Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6712673 | Polishing apparatus, polishing head and method | Peter Albrecht, David Vadnais | 2004-03-30 |
| 6709981 | Method and apparatus for processing a semiconductor wafer using novel final polishing method | Alexis Grabbe, Mick Bjelopavlic, Michele Haler, Guoqiang Zhang, Henry F. Erk +1 more | 2004-03-23 |