Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6752916 | Electrochemical planarization end point detection | Yan Fang, Jayanthi Pallinti | 2004-06-22 |
| 6713394 | Process for planarization of integrated circuit structure which inhibits cracking of low dielectric constant dielectric material adjacent underlying raised structures | Jayanthi Pallinti, Dawn M. Lee | 2004-03-30 |