Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734971 | Method and apparatus for self-referenced wafer stage positional error mapping | Adlai H. Smith, Bruce McArthur | 2004-05-11 |
| 6699627 | Reference wafer and process for manufacturing same | Adlai H. Smith, Bruce McArthur | 2004-03-02 |