Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833221 | Method and apparatus for proper ordering of registration data | Adlai H. Smith | 2004-12-21 |
| 6741338 | In-situ source metrology instrument and method of use | Adlai H. Smith | 2004-05-25 |
| 6734971 | Method and apparatus for self-referenced wafer stage positional error mapping | Adlai H. Smith, Robert O. Hunter, Jr. | 2004-05-11 |
| 6699627 | Reference wafer and process for manufacturing same | Adlai H. Smith, Robert O. Hunter, Jr. | 2004-03-02 |