Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6783626 | Treatment and evaluation of a substrate processing chamber | Chong Hwan Chu | 2004-08-31 |
| 6756313 | Method of etching silicon nitride spacers with high selectivity relative to oxide in a high density plasma chamber | Jinhan Choi, Bi Jang | 2004-06-29 |