Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6756313 | Method of etching silicon nitride spacers with high selectivity relative to oxide in a high density plasma chamber | Jinhan Choi, Nam Hun Kim | 2004-06-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6756313 | Method of etching silicon nitride spacers with high selectivity relative to oxide in a high density plasma chamber | Jinhan Choi, Nam Hun Kim | 2004-06-29 |