Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819822 | Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing | Behrang Behin, Michael Julian Daneman, Meng-Hsiung Kiang, Kam-Yin Lau | 2004-11-16 |
| 6744173 | Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods | Behrang Behin | 2004-06-01 |