Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819820 | Use of applied force to improve MEMS switch performance | Murali Chaparala | 2004-11-16 |
| 6819822 | Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing | Behrang Behin, Meng-Hsiung Kiang, Kam-Yin Lau, Satinderpall S. Pannu | 2004-11-16 |
| 6788520 | Capacitive sensing scheme for digital control state detection in optical switches | Behrang Behin, Meng-Hsiung Kiang, Kam-Yin Lau, Timothy Beerling | 2004-09-07 |
| 6764936 | Mechanical landing pad formed on the underside of a MEMS device | Behrang Behin, Meng-Hsiung Kiang | 2004-07-20 |