Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827092 | Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same | Stephen M. Smith | 2004-12-07 |
| 6748961 | Angular spin, rinse, and dry module and methods for making and implementing the same | — | 2004-06-15 |