Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827092 | Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same | Randolph Treur | 2004-12-07 |
| 6752162 | Edge roller assembly, method for contacting an edge of a substrate, and transport system for transporting semiconductor wafers to a wafer processing station | Douglas G. Gardner, Brian Bliven | 2004-06-22 |