Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777344 | Post-etch photoresist strip with O2 and NH3 for organosilicate glass low-K dielectric etch applications | Rao Annapragada, Chok W. Ho | 2004-08-17 |
| 6696366 | Technique for etching a low capacitance dielectric layer | Susan Ellingboe, Janet M. Flanner, Christine Janowiak, John Lang | 2004-02-24 |