Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6722022 | Apparatus for calibrating the position of a wafer platform in an ion implanter | Yu-Chun Peng, Yi Tang | 2004-04-20 |
| 6696689 | Method and apparatus for avoiding driver gas contamination in an ion implanter gas supply module | — | 2004-02-24 |