Yu-Chun Peng

TSMC: 1 patents #234 of 898Top 30%

Overall (2004): #79,545 of 270,089Top 30%

Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #	Title	Co-Inventors	Date
6722022	Apparatus for calibrating the position of a wafer platform in an ion implanter	Lu Chen, Yi Tang	2004-04-20