Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6750600 | Hall-current ion source | Harold R. Kaufman, Raymond S. Robinson, Viacheslav V. Zhurin | 2004-06-15 |
| 6724160 | Ion-source neutralization with a hot-filament cathode-neutralizer | Harold R. Kaufman, Viacheslav V. Zhurin | 2004-04-20 |
| 6682634 | Apparatus for sputter deposition | Harold R. Kaufman, Viacheslav V. Zhurin, David A. Baldwin, Todd Hylton | 2004-01-27 |