Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819871 | Multi-channel optical filter and multiplexer formed from stacks of thin-film layers | Todd Hylton | 2004-11-16 |
| 6723209 | System and method for performing thin film deposition or chemical treatment using an energetic flux of neutral reactive molecular fragments, atoms or radicals | Todd Hylton | 2004-04-20 |
| 6689255 | System and method for making thin-film structures using a stepped profile mask | Todd Hylton | 2004-02-10 |
| 6682634 | Apparatus for sputter deposition | James R. Kahn, Harold R. Kaufman, Viacheslav V. Zhurin, Todd Hylton | 2004-01-27 |
| 6679976 | System and method for performing sputter deposition with multiple targets using independent ion and electron sources and independent target biasing with DC pulse signals | Todd Hylton | 2004-01-20 |