Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806941 | Pattern forming method and pattern forming apparatus | Iwao Higashikawa, Yoji Ogawa, Shigehiro Hara, Kazuko Yamamoto | 2004-10-19 |
| 6760101 | Method for inspecting exposure apparatus | Kazuya Sato | 2004-07-06 |
| 6727028 | Pattern formation method, mask for exposure used for pattern formation, and method of manufacturing the same | Toshiya Kotani, Satoshi Tanaka | 2004-04-27 |
| 6701512 | Focus monitoring method, exposure apparatus, and exposure mask | Takumichi Sutani, Tadahito Fujisawa, Takashi Sato, Takashi Sakamoto, Masafumi Asano | 2004-03-02 |