Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6813001 | Exposure method and apparatus | Tadahito Fujisawa, Tatsuhiko Higashiki | 2004-11-02 |
| 6741334 | Exposure method, exposure system and recording medium | Tadahito Fujisawa, Kyoko Izuha | 2004-05-25 |
| 6701512 | Focus monitoring method, exposure apparatus, and exposure mask | Takumichi Sutani, Tadahito Fujisawa, Takashi Sato, Takashi Sakamoto, Soichi Inoue | 2004-03-02 |