Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835942 | Method for correcting a proximity effect, an exposure method, a manufacturing method of a semiconductor device and a proximity correction module | Shinji Sato | 2004-12-28 |
| 6718532 | Charged particle beam exposure system using aperture mask in semiconductor manufacture | Ryoichi Inanami, Atsushi Ando | 2004-04-06 |
| 6675368 | Apparatus for and method of preparing pattern data of electronic part | Mariko Takayanagi, Tatsuya Ohguro | 2004-01-06 |