Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6756159 | Method of preparing exposure data and method of preparing aperture mask data | — | 2004-06-29 |
| 6718532 | Charged particle beam exposure system using aperture mask in semiconductor manufacture | Shunko Magoshi, Atsushi Ando | 2004-04-06 |