Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770836 | Impedance matching circuit for inductively coupled plasma source | Gi-Chung Kwon, Hong-Sik Byun, Hong-Seub Kim, Sun-Seok Han, Bu-Jin Ko +1 more | 2004-08-03 |
| 6685800 | Apparatus for generating inductively coupled plasma | Hong-Seub Kim, Gi-Chung Kwon, Sun-Seok Han, Choong-Won Lee, Hong-Sik Byun | 2004-02-03 |