Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770836 | Impedance matching circuit for inductively coupled plasma source | Hong-Sik Byun, Sung-Weon Lee, Hong-Seub Kim, Sun-Seok Han, Bu-Jin Ko +1 more | 2004-08-03 |
| 6768269 | Plasma process chamber monitoring method and system used therefor | Hong-Sik Byun, Young Suk Lee | 2004-07-27 |
| 6685800 | Apparatus for generating inductively coupled plasma | Hong-Seub Kim, Sun-Seok Han, Choong-Won Lee, Sung-Weon Lee, Hong-Sik Byun | 2004-02-03 |
| 6683274 | Wafer susceptor | Soo-Sik Yoon, Hong-Sik Byun | 2004-01-27 |