Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6774990 | Method to inspect patterns with high resolution photoemission | Alan Stivers, Edita Tejnil | 2004-08-10 |
| 6720118 | Enhanced inspection of extreme ultraviolet mask | Pei-Yang Yan, Guojing Zhang | 2004-04-13 |