Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825557 | Localized backside chip cooling with integrated smart valves | Michael DiBattista | 2004-11-30 |
| 6780658 | Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing | Paul Winer, Gary Woods, Michael DiBattista | 2004-08-24 |
| 6753541 | Method and apparatus for making and using a beacon fiducial for an integrated circuit | Steve Seidel, Simon Tam, Valluri Rao, Stefan Rusu | 2004-06-22 |