Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825557 | Localized backside chip cooling with integrated smart valves | Richard H. Livengood | 2004-11-30 |
| 6780658 | Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing | Richard H. Livengood, Paul Winer, Gary Woods | 2004-08-24 |