Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825117 | High PH slurry for chemical mechanical polishing of copper | Anne Miller, A. Feller | 2004-11-30 |
| 6752844 | Ceric-ion slurry for use in chemical-mechanical polishing | Anne Miller, A. Feller | 2004-06-22 |
| 6740591 | Slurry and method for chemical mechanical polishing of copper | Anne Miller, A. Feller | 2004-05-25 |
| 6719614 | Method and chemistry for cleaning of oxidized copper during chemical mechanical polishing | Anne Miller, A. Feller | 2004-04-13 |