Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824451 | Process for the abrasive machining of surfaces, in particular of semiconductor wafers | Andreas Römer | 2004-11-30 |
| 6695687 | Semiconductor substrate holder for chemical-mechanical polishing containing a movable plate | Peter Lahnor | 2004-02-24 |