Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830873 | Method for adjusting and expposing the second level of a phase-shift mask | Dirk Löffelmacher | 2004-12-14 |
| 6821693 | Method for adjusting a multilevel phase-shifting mask or reticle | Dirk Loeffelmacher, Timo Wandel | 2004-11-23 |