Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821693 | Method for adjusting a multilevel phase-shifting mask or reticle | Gernot Goedl, Timo Wandel | 2004-11-23 |
DL
Dirk Loeffelmacher
Overall (2004): #233,551 of 270,089Top 90%
1
Patents 2004