Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770530 | Method for producing a shallow trench isolation for n- and p-channel field-effect transistors in a semiconductor module | Dirk Efferenn, Hans-Peter Moll | 2004-08-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770530 | Method for producing a shallow trench isolation for n- and p-channel field-effect transistors in a semiconductor module | Dirk Efferenn, Hans-Peter Moll | 2004-08-03 |