Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770530 | Method for producing a shallow trench isolation for n- and p-channel field-effect transistors in a semiconductor module | Dirk Efferenn, Andreas Wich-Glasen | 2004-08-03 |
| 6716720 | Method for filling depressions on a semiconductor wafer | Dirk Efferenn | 2004-04-06 |