Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835589 | Three-dimensional integrated CMOS-MEMS device and process for making the same | H. Bernhard Pogge, Michel Despont, Chandrika Prasad, Peter Vettiger, Roy Yu | 2004-12-28 |
| 6770558 | Selective filling of electrically conductive vias for three dimensional device structures | Emmanuel Delamarche, Michel Despont, Matthias Geissler | 2004-08-03 |