Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6754062 | Hybrid ceramic electrostatic clamp | Joseph S. Logan, John R. Miller, Mahmood Naim | 2004-06-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6754062 | Hybrid ceramic electrostatic clamp | Joseph S. Logan, John R. Miller, Mahmood Naim | 2004-06-22 |