Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6754062 | Hybrid ceramic electrostatic clamp | John R. Miller, Mahmood Naim, Robert E. Tompkins | 2004-06-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6754062 | Hybrid ceramic electrostatic clamp | John R. Miller, Mahmood Naim, Robert E. Tompkins | 2004-06-22 |