Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6766507 | Mask/wafer control structure and algorithm for placement | James A. Bruce, Stephen E. Knight, Joshua J. Krueger, Jed H. Rankin | 2004-07-20 |
| 6716559 | Method and system for determining overlay tolerance | Robert K. Leidy, Timothy C. Milmore | 2004-04-06 |
| 6674516 | Method of photolithographic exposure dose control as a function of resist sensitivity | Keith J. Machia, Charles J. Parrish, Craig E. Schneider, Charles A. Whiting | 2004-01-06 |