Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780720 | Method for fabricating a nitrided silicon-oxide gate dielectric | Jay Burnham, Anthony I. Chou, Toshiharu Furukawa, Margaret L. Gibson, Steven M. Shank | 2004-08-24 |
| 6706644 | Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors | Jay Burnham, James J. Quinlivan, Steven M. Shank, Deborah A. Tucker, Beth Ward | 2004-03-16 |