Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6735492 | Feedback method utilizing lithographic exposure field dimensions to predict process tool overlay settings | John S. Smyth, Charles A. Whiting, David A. Ziemer | 2004-05-11 |
| 6704695 | Interactive optical proximity correction design method | Orest Bula, Daniel C. Cole, William C. Leipold | 2004-03-09 |
| 6694498 | Feed-forward lithographic overlay offset method and system | Charles J. Parrish, Charles A. Whiting | 2004-02-17 |