Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797368 | Reflective-type mask blank for exposure, method of producing the same, and reflective-type mask for exposure | — | 2004-09-28 |
| 6749973 | Reflection type mask blank for EUV exposure and reflection type mask for EUV exposure as well as method of producing the mask | Morio Hosoya | 2004-06-15 |
| 6737201 | Substrate with multilayer film, reflection type mask blank for exposure, reflection type mask for exposure and production method thereof as well as production method of semiconductor device | Morio Hosoya | 2004-05-18 |