Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6749973 | Reflection type mask blank for EUV exposure and reflection type mask for EUV exposure as well as method of producing the mask | Tsutomu Shoki | 2004-06-15 |
| 6737201 | Substrate with multilayer film, reflection type mask blank for exposure, reflection type mask for exposure and production method thereof as well as production method of semiconductor device | Tsutomu Shoki | 2004-05-18 |